Prosenjit Rai-Choudhury
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Mems And Moems Technology And Applications
Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication (Spie Press Monograph, Pm39-Pm40)
Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
MEMS and MOEMS Technology and Applications
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